kw.\*:("HfO2")
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Atomic layer deposition of HfO2 thin films using H2O2 as oxidantCHOI, Min-Jung; PARK, Hyung-Ho; DOO SEOK JEONG et al.Applied surface science. 2014, Vol 301, pp 451-455, issn 0169-4332, 5 p.Article
Reliability characteristics of high-K gate dielectrics HfO2 in metal-oxide semiconductor capacitorsDEDONG HAN; JINFENG KANG; CHANGHAI LIN et al.Microelectronic engineering. 2003, Vol 66, Num 1-4, pp 643-647, issn 0167-9317, 5 p.Conference Paper
Chemical structures and electrical properties of atomic layer deposited HfO2 thin films grown at an extremely low temperature (≤100°C) using O3 as an oxygen sourceJEONG HWAN KIM; TAE JOO PARK; SEONG KEUN KIM et al.Applied surface science. 2014, Vol 292, pp 852-856, issn 0169-4332, 5 p.Article
The effect of La2O3-incorporation in HfO2 dielectrics on Ge substrate by atomic layer depositionOH, Il-Kwon; KIM, Min-Kyu; MAENG, W. J et al.Applied surface science. 2013, Vol 287, pp 349-354, issn 0169-4332, 6 p.Article
Electrical properties improvement of high-k HfO2 films by combination of C4F8 dual-frequency capacitively coupled plasmas treatment with thermal annealingZHANG, H. Y; YE, C; WU, X. M et al.Applied surface science. 2014, Vol 311, pp 117-123, issn 0169-4332, 7 p.Article
Impact of Ni Concentration on the Performance of Ni Silicide/HfO2/TiN Resistive RAM (RRAM) CellsCHEN, Z. X; FANG, Z; WANG, Y et al.Journal of electronic materials. 2014, Vol 43, Num 11, pp 4193-4198, issn 0361-5235, 6 p.Article
Metal carbide-induced negative flatband voltage shift in TaCx and HfCx/HfO2 gate stacksMIZUBAYASHI, Wataru; AKIYAMA, Koji; WENWU WANG et al.Applied surface science. 2008, Vol 254, Num 19, pp 6123-6126, issn 0169-4332, 4 p.Conference Paper
Oxygen-related defects in amorphous HfO2 gate dielectricsKANETA, C; YAMASAKI, T.Microelectronic engineering. 2007, Vol 84, Num 9-10, pp 2370-2373, issn 0167-9317, 4 p.Conference Paper
Band bending and band alignment at HfO2/HfSixOy/Si interfacesWEIJIE SONG; YOSHITAKE, Michiko; RUIQIN TAN et al.Applied surface science. 2007, Vol 253, Num 7, pp 3508-3511, issn 0169-4332, 4 p.Article
Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structuresJANCOVIC, Peter; HUDEC, Boris; DOBROCKA, Edmund et al.Applied surface science. 2014, Vol 312, pp 112-116, issn 0169-4332, 5 p.Article
Interface characterization and current conduction in HfO2-gated MOS capacitorsCHEN, H. W; CHIU, F. C; LIU, C. H et al.Applied surface science. 2008, Vol 254, Num 19, pp 6112-6115, issn 0169-4332, 4 p.Conference Paper
EPR study of defects in as-received, γ-irradiated and annealed monoclinic HfO2 powderWRIGHT, Sandra; FEENEY, S; BARKLIE, R. C et al.Microelectronic engineering. 2007, Vol 84, Num 9-10, pp 2378-2381, issn 0167-9317, 4 p.Conference Paper
Characterization of HfO2 dielectric films with low energy SIMSJIANG, Z. X; KIM, K; LERMA, J et al.Applied surface science. 2006, Vol 252, Num 19, pp 7172-7175, issn 0169-4332, 4 p.Conference Paper
Impacts of Au-doping on the performance of Cu/HfO2/Pt RRAM devicesTINGTING TAN; TINGTING GUO; XI CHEN et al.Applied surface science. 2014, Vol 317, pp 982-985, issn 0169-4332, 4 p.Article
PHOTODISSOCIATION DE L'EAU SENSIBILISEE AVEC HFO2KUZNETSOV VN; LISACHENKO AA; VILESOV FI et al.1972; KINET. I KATALIZ; S.S.S.R.; DA. 1972; VOL. 13; NO 4; PP. 1082-1084; BIBL. 6 REF.Serial Issue
Mixed amide-malonate compound of hafnium as a novel monomeric precursor for MOCVD of HfO2 thin filmsMILANOV, A; BHAKTA, R; THOMAS, R et al.Journal of material chemistry. 2006, Vol 16, Num 5, pp 437-440, issn 0959-9428, 4 p.Article
Formation and disruption of conductive filaments in a HfO2/TiN structureBRIVIO, S; TALLARIDA, G; CIANCI, E et al.Nanotechnology (Bristol. Print). 2014, Vol 25, Num 38, issn 0957-4484, 385705.1-385705.7Article
The relation between the electron energy loss spectra of hafnia and its dielectric functionVOS, Maarten; GRANDE, Pedro Luis.Surface science. 2014, Vol 630, pp 1-8, issn 0039-6028, 8 p.Article
Enhanced d33 value in HfO2-modified (Ba0.98Ca0.02)(Ti0.94Sn0.06)O3 ceramicsJIAGANG WU; TAO WANG; XIAOJING CHENG et al.Journal of alloys and compounds. 2013, Vol 576, pp 299-301, issn 0925-8388, 3 p.Article
Improved interfacial and electrical properties of atomic layer deposition HfO2 films on Ge with La203 passivationLI, Xue-Fei; LIU, Xiao-Jie; CAO, Yan-Qiang et al.Applied surface science. 2013, Vol 264, pp 783-786, issn 0169-4332, 4 p.Article
IR study of fundamental chemical reactions in atomic layer deposition of HfO2 with tetrakis(ethylmethylamino)hafnium (TEMAH), ozone, and water vaporHIROSE, F; KINOSHITA, Y; KANOMATA, K et al.Applied surface science. 2012, Vol 258, Num 19, pp 7726-7731, issn 0169-4332, 6 p.Article
Study on electrical characteristics and reliability of fluorinated HfO2 for HKMGLEE, J. C; KIM, Y. P; ZULKARNAIN et al.Microelectronic engineering. 2011, Vol 88, Num 7, pp 1417-1420, issn 0167-9317, 4 p.Conference Paper
Studies of the phosphorescence of polycrystalline hafniaPEJAKOVIC, Dušan A.Journal of luminescence. 2010, Vol 130, Num 6, pp 1048-1054, issn 0022-2313, 7 p.Article
Reliability degradation of thin HfO2/SiO2 gate stacks by remote RF hydrogen and deuterium plasma treatmentEFTHYMIOU, E; BERNARDINI, S; ZHANG, J. F et al.Thin solid films. 2008, Vol 517, Num 1, pp 207-208, issn 0040-6090, 2 p.Conference Paper
Effect of SiO2 protective layer on the femtosecond laser-induced damage of HfO2/SiO2 multilayer high-reflective coatingsLEI YUAN; YUANAN ZHAO; CONGJUAN WANG et al.Applied surface science. 2007, Vol 253, Num 7, pp 3450-3454, issn 0169-4332, 5 p.Article